grating interferometer meaning in English
光栅干涉仪
Examples
- A research on diffraction grating interferometer with high accuracy
高精度衍射光栅干涉仪的研制 - The main works and contributions achieved in this dissertation are concluded as follows : 1 . based on the scalar diffraction theory , the mathematical model of optical configuration of transmissive grating interferometer is established . it indicats that moir interference fringes is affected by many parameters , such as grating pitch , light wavelength , light beam size and incidence angle , etc . the variation that the width , intensity , orientation and contrast of moir interference fringes along with every parameter is numerically analyzed
主要的研究内容和所取得的成果可归纳如下: 1 .基于标量衍射理论,建立了透射式光栅干涉仪光路的数学模型,分析了透射式光栅干涉仪的莫尔干涉条纹与光栅栅距、光栅开口比、光波波长、光斑尺寸、光束入射角等多个参数的关系。 - It has many unique advantages compared with laser interferometry . and it can achieve higher accuracy and resolution than traditional geometry moir . it has been proved to be very useful in many practical applications , such as microelectronics , ultra - precision manufacturing , bioengineering , medicine , space technology , and material science , etc . in this dissertation , key technologies of nanometer displacement measurement by grating interferometry are systematically investigated , which mainly include measuring theories , designing grating interferometer and new subdividing method for moir interference fringes
作为能够实现纳米级位移测量的技术之一,光栅干涉位移测量技术具有激光干涉仪不具备的独特优点,可以获得比几何莫尔术更高的测量准确度、更高的分辨率,在诸如微电子、超精加工、生物工程、未来医学、航天技术、材料科学等众多领域有广泛的应用前景。